A V-Shaped Actuator Utilizing Electrostatic Force

A Bi-Directional Out-of-Plane Actuator by Electrostatic Force

Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the electrostatic repulsive principle and the electrostatic attractive principle. By taking advantage of the electrostatic repulsive mode, the common “pull-in” instability can be lessened to enlarge the displacement, and by applying the electrostatic attractive mode, the out-of-plane displacement is f...

Atomic force microscope based biomolecular force-clamp measurements using a micromachined electrostatic actuator.

The authors describe a method for biomolecular force clamp measurements using atomic force microscope (AFM) cantilevers and micromachined membrane-based electrostatic actuators. The actuators comprise of Parylene membranes with embedded side actuation electrodes and are fabricated on a silicon substrate. The devices have a displacement range of 1.8 μm with 200 V actuation voltage, and displacem...

GDQEM Analysis for Free Vibration of V-shaped Atomic Force Microscope Cantilevers

V-shaped and triangular cantilevers are widely employed in atomic force microscope (AFM) imaging techniques due to their stability. For the design of vibration control systems of AFM cantilevers which utilize patched piezo actuators, obtaining an accurate system model is indispensable prior to acquiring the information related to natural modes. A general differential quadrature element method (...

Spatially Varied Flow Profiles in a V-Shaped Side-Channel

A Comprehensive Model for Stiffness Coefficients in V-Shaped Cantilevers

   During past decade the AFM based nanomanipulation has been focus of attention as the promising nano fabrication approach. The main challenge in this process is the real-time monitoring. Consequently, the dynamic models have been proposed as a solution to the existing challenge. In the modeling approach the magnitudes of the forces are proportional to the stiffness coefficients o...